R. K. Matta

Evaluation of Passivated Integrated Circuits Using the Scanning Electron Microscope

T. E. Everhart, Oliver C. Wells, R. K. Matta · Journal of The Electrochemical Society · 1964 · 88 citations

Engineering, Microscopy, Integrated Circuits +21

A novel method of semiconductor device measurements

T. E. Everhart, Oliver C. Wells, R. K. Matta · Proceedings of the IEEE · 1964 · 61 citations

Engineering, Measurement, Microscopy +19

Automatic positioning of device electrodes using the scanning electron microscope

Oliver C. Wells, T. E. Everhart, R. K. Matta · IEEE Transactions on Electron Devices · 1965 · 31 citations

Engineering, Electron-beam Lithography, Microscopy +23

Examining Three-Dimensional Microstructures with the Scanning Electron Microscope

J. W. Thornhill, R. K. Matta, W. H. Wood · Grana Palynologica · 1965 · 30 citations · Full text

Materials Science, Biology, Engineering +15

REVERSIBLE CHANGES IN TRANSISTOR CHARACTERISTICS CAUSED BY SCANNING ELECTRON MICROSCOPE EXAMINATION

D. Green, J. E. Sandor, T.W. O'Keeffe et al. · Applied Physics Letters · 1965 · 29 citations

Engineering, Microscopy, Bibliometrics +16