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Role of Tin+ and Aln+ ion irradiation (n=1, 2) during Ti1-xAlxN alloy film growth in a hybrid HIPIMS/magnetron mode

DOIFull Paper Access

139

Citations

34

References

2012

Year

Grzegorz Greczyński, Jun Lü, Mats Johansson, Jens Jensen, I. Petrov, J. E. Greene, Lars Hultman
Surface and Coatings Technology

References

YearCitations

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