Multi-probe scanning system comprising three laser interferometers and one autocollimator for measuring flat bar mirror profile with nanometer accuracy

Self-Calibration: Reversal, Redundancy, Error Separation, and ‘Absolute Testing’

C. J. Evans, R.J. Hocken, William T. Estler · CIRP Annals · 1996 · 394 citations

Engineering, Systems Engineering, Instrumentation +10

Some theoretical aspects of error separation techniques in surface metrology

David J. Whitehouse · Journal of Physics E Scientific Instruments · 1976 · 254 citations

Engineering, Materials Engineering, Metrology +15

Measurement of multi-degree-of-freedom error motions of a precision linear air-bearing stage

Wei Gao, Yoshikazu Arai, Atsushi Shibuya et al. · Precision Engineering · 2005 · 131 citations

Engineering, Mechanical Engineering, Mechatronics Engineering +11

Precision measurement of cylinder straightness using a scanning multi-probe system

Wei Gao, Jun Yokoyama, Hidetoshi Kojima et al. · Precision Engineering · 2002 · 120 citations

Engineering, Mechatronics Engineering, Instrumentation +12

Solution to the shearing problem

Clemens Elster, I. Weingärtner · Applied Optics · 1999 · 108 citations

Natural Sciences, Biomedical Engineering, Biomedical Optics +10