Integration and electrical characterization of carbon nanotube via interconnects

Nicolò Chiodarelli, Yunlong Li, Daire Cott, S. Mertens, Nick Peys, Marc Heyns, Stefan De Gendt, G. Groeseneken, Philippe M. Vereecken

Microelectronic Engineering · 2010 · 66 citations · 19 references

Concepts

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