Atomic layer deposition of MnO using Bis(ethylcyclopentadienyl)manganese and H2O - Concepedia

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Atomic layer deposition of MnO using Bis(ethylcyclopentadienyl)manganese and H2O

74

Citations

30

References

2009

Year

B. B. Burton, F. Fabreguette, Steven M. George

Thin Solid Films

Materials ScienceChemical EngineeringEngineeringOxide ElectronicsSurface ScienceChemical DepositionChemical Vapor DepositionAtomic Layer Deposition

References

	Year	Citations

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