Single-crystal silicon torsional resonators

Abstract

Micromechanical torsional resonators with micron-sized torsion rods fabricated from single-crystal silicon are described. The resonators and their excitation electrodes are fabricated with two simple processes called SCREAM (single-crystal-silicon reactive etch and metal). The properties of each electrode-actuator scheme are evaluated using electrostatic simulations. Such torsional resonators have potentially lower mechanical dissipation, and torsional resonators with integrated electrodes have potentially novel actuation applications.< <ETX xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">&gt;</ETX>