Materials Letters · 2012 · 14 citations · 7 references
EngineeringMaterials EngineeringMaterials ScienceMechanical Behavior Of MaterialsMicroelectromechanical SystemsMicrofabricationFatigueMems ActuatorsMems MaterialsMems TestingMicrofabrication MaterialsThin Film Mechanical PropertiesFatigue FractureFatigue LimitFatigue Testing Of Mems DevicesMechanical Testing Of Mems DevicesMems Reliability TestingStress-induced FailureVibration Testing Of Mems Devices
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Materials issues in microelectromechanical systems (MEMS)
S.M. Spearing · Acta Materialia · 2000 · 652 citations