High-resolution, high-speed, low data age uncertainty, heterodyne displacement measuring interferometer electronics

Abstract

An advanced displacement measuring interferometer system has been developed to satisfy the needs of semiconductor manufacturing and lithography. The system electronics provides a position resolution of 0.31 nm at velocities up to 2.1 m when the system is used with a double-pass interferometer. Output data rates up to samples per second are available. The data age, which is the delay from the interferometer optics to the measurement sample, can be adjusted to equalize differences between axes to within 1 ns. This low data age uncertainty is necessary for high-resolution, high-speed, multiple-axis measurements.