Applied Surface Science · 1997 · 74 citations · 15 references
Natural SciencesMaterials EngineeringMaterials ScienceMaterials ChemistrySurface ScienceThin FilmsEpitaxial GrowthThin Film NucleationFilm Growth MechanismsPrecursor ChemistryThin Oxide FilmsThin-film Growth KineticsThin-film Growth Mechanisms
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Nguyen Q. Minh · Journal of the American Ceramic Society · 1993 · 3.8K citations
Natural Sciences, Materials Engineering, Materials Science +17