Predicting defect-tolerant yield in the embedded core context

Abstract

We address the problem of predicting the yield of a chip composed of cores. A center-satellite model is used to directly represent observed spatial autocorrelation of integrated circuit spot defects. This model is compared to another (large-area clustering) model that only indirectly represents intrawafer correlation. We illustrate that, when different portions of a chip have different susceptibility to defects, the chip layout will affect the predicted yield. This is particularly relevant when portions of a chip are defect-tolerant because their susceptibility to defects is dramatically different. We illustrate how the yield models can be used to predict the utility of making much of a chip (or an embedded core) defect-tolerant. Two yield points parameterized the models. The one extra parameter of, and the suitability of, the center-satellite model allowed it to track the yield data points with less than 1 /10,000 of the error of the large-area clustering model. However, the simpler large-area clustering model is accurate in some circumstances, especially when the chip area is small.