Publication | Closed Access
Effects on surface morphology of epitaxial Y2O3 layers on Si (001) after postgrowth annealing
44
Citations
17
References
2004
Year
Materials EngineeringMaterials ScienceEngineeringOxide ElectronicsSurface ScienceApplied PhysicsMolecular Beam EpitaxySilicon On InsulatorEpitaxial GrowthSurface MorphologyEpitaxial Y2o3 Layers
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