Concepedia

Publication | Open Access

A differential resonator design using a bossed structure for applications in mechanical sensors

DOIFull Paper Access

12

Citations

8

References

1991

Year

H.A.C. Tilmans, S. Bouwstra, Dominicus J. Ijntema, M. Elwenspoek, Carl F. Klein
Sensors and Actuators A Physical

References

YearCitations

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