Microgrippers fabricated by the LIGA technique - Concepedia

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Microgrippers fabricated by the LIGA technique

46

Citations

10

References

1997

Year

S. Ballandras, Skandar Basrour, Laurent Robert, S. Megtert, P. Blind, M Rouillay, P. Bernede, W. Daniau

Sensors and Actuators A Physical

EngineeringMicrofabricationMechanical EngineeringMicroscale SystemMicromachiningMicrofluidicsLiga Technique

References

	Year	Citations

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