31
Publications
830
Citations
18
H-Index
1978
Active since
S. Megtert is an author at Université Paris-Sud specializing in engineering, applied physics, and materials science.
Top concepts
EngineeringApplied PhysicsMaterial SciencePhysicsCondensed Matter PhysicsThin FilmsSuperconductivityMicrofabricationMechanical EngineeringMicrostructure
Publications per year
1978–2013
31
31
Microfabrication: LIGA-X and applications
R. K. Kupka, F. Bouamrane, Carsten Cremers et al. · Applied Surface Science · 2000 · 98 citations
Microgrippers fabricated by the LIGA technique
S. Ballandras, Skandar Basrour, Laurent Robert et al. · Sensors and Actuators A Physical · 1997 · 46 citations
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