Publication | Closed Access
Observation, analysis, and simulation of the hysteresis of silicon using ultra-micro-indentation with spherical indenters
160
Citations
13
References
1993
Year
Electrical EngineeringEngineeringSpherical IndentersMicrofabricationMechanical EngineeringApplied PhysicsSolid MechanicsHysteresisMicro-electromechanical SystemSilicon On InsulatorMicrostructureSilicon Debugging
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