Concepedia

Comparison between fluid simulations and experiments in inductively coupled argon/chlorine plasmas

Cormac Corr, E. Despiau-Pujo, P. Chabert, W. G. Graham, Fernando García Marro, David B. Graves

Journal of Physics D Applied Physics · 2008 · 45 citations · 35 references

DOI

Concepts

Abstract

Comparisons of 2D fluid simulations with experimental measurements of Ar/Cl2 plasmas in a low-pressure inductively coupled reactor are reported. Simulations show that the wall recombination coefficient of Cl atom (γ) is a crucial parameter of the model a

References

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