Two-dimensional fluid model of an inductively coupled plasma with comparison to experimental spatial profiles

Abstract

A key need for the development and testing of models suitable for chemically active, low pressure plasmas is detailed comparisons between model predictions and experimental measurements. In this paper, a two-dimensional, axisymmetric fluid model of an inductively coupled plasma is described, and model predictions are compared to the experimental measurements of P. A. Miller, G. A. Hebner, K. E. Greenberg, P. D. Pochan, and B. P. Aragon [J. Res. Natl. Inst. Stand. Technol. 100, 427 (1995)] of electron density, electron temperature, and plasma potential. Comparisons between model predictions and experimental measurements were made in argon and chlorine discharges. Qualitative to semiquantitative agreement between the model predictions and experimental diagnostics was observed, suggesting that assumptions made in the model are reasonably accurate.