Characterization of micromachined silicon rectangular waveguide at 400 GHz

Abstract

We present the first characterization of a micromachined silicon rectangular waveguide at 400GHz. The silicon waveguide has an average loss of 0.086dB/mm for a range of 350-460GHz. The waveguides are formed using well known microfabrication techniques and demonstrate a successful first step towards the use of silicon waveguides as a viable option for THz systems.