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ITO Films Prepared by Long-throw Magnetron Sputtering without Oxygen Partial Pressure

Materials EngineeringMagnetismMaterials ScienceEngineeringPhysicsSurface ScienceApplied PhysicsIto Films PreparedLong-throw MagnetronMagnetic Thin FilmsThin FilmsMagnetic DeviceMicroelectronicsThin Film ProcessingOxygen Partial Pressure