Concepedia

Automatic mask alignment without a microscope

A.K. Kanjilal, Ram Narain, Rina Sharma, V.T. Chitnis, Brahm Pal Singh, Jingnan Liu, Junko Yamada, Yoshiaki Uchida

IEEE Transactions on Instrumentation and Measurement · 1995 · 18 citations · 3 references

DOI

Concepts

Abstract

A novel method for automatic mask alignment without using a microscope is reported. This method relies on the moire technique,

References

3

Photolithographic Mask Alignment Using Moiré Techniques

Matt King, Donald H. Berry · Applied Optics · 1972 · 64 citations

, , +17

Automatic alignment system for optical projection printing

G. Bouwhuis, S. Wittekoek · IEEE Transactions on Electron Devices · 1979 · 37 citations

, , +13

An automatic mask alignment technique using moiré interference

Yoshiyuki Uchida, Shūzo Hattori, Tsutomu Nomura · Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena · 1987 · 26 citations

, , +15