IEEE Transactions on Biomedical Engineering · 1998 · 88 citations · 15 references
EngineeringMicromachinesMicrofabricationBiomechanicsMechanical EngineeringMyosin-coated SurfaceScanning Force MicroscopyMicromachined Ultrasonic TransducerBiomedical EngineeringMicroactuatorMicro-electromechanical SystemCantilever-beam Force TransducersBiophysicsMolecular ForcesSimple Resonance Method
We present two new microfabricated cantilever-beam force transducers. The transducers were fabricated from thin silicon-nitride films, and were used respectively to measure forces generated by two small-muscle preparations: the single myofibril, and the single actin filament in contact with a myosin-coated surface. A simple resonance method was developed to characterize the transducers. Because of the high reproducibility of lever dimensions and the consistency of the modulus of elasticity, few calibration measurements sufficed to characterize the stiffness of all the levers on a single wafer.
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Miniaturization of Tuning Forks
W.E. Newell · Science · 1968 · 304 citations
Akihiko Ishijima, H Kojima, Hideo Higuchi et al. · Biophysical Journal · 1996 · 228 citations · Full text
Nanorobotics, Engineering, Nanometer-piconewton Manipulation +13