Publication | Closed Access
Sculpturing Nanowires with Ion Beams
21
Citations
14
References
2009
Year
EngineeringContinuous NanowiresGradual DownsizingIon ImplantationNanostructure SynthesisNanometrologyNanoscale ScienceNanolithography MethodMaterials ScienceNanoscale SystemNanotechnologyNanostructuringMicrofabricationNanomaterialsIon BeamsApplied PhysicsWide Ion BeamsNanofabricationNanostructures
Low-energy, wide ion beams can be effectively used for gradual downsizing and shaping of prefabricated nanostructures in the sub-50-nm size regime (see image). A unique sculpturing capability exhibited by energetic ions on the nanometer scale enables mass production of continuous nanowires with an effective diameter of less than 10 nm.
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