2003 · 12 citations · 4 references
EngineeringComputer EngineeringManufacturing EngineeringManufacturing ProcessesProduction EngineeringSpatial AnalysisFault DetectionYield AnalysisResponse TimeSpatial Yield AnalysisVolume ProductionYield Loss Analysis
In high volume production, it is important to have a fast response time to yield loss mechanisms. This paper presents a way to detect spatial yield loss on wafers. A procedure automatically computes and provides a summary of signatures taking into account all of the processed wafer. This reduces manual manipulation of data, providing a faster response time.
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Classification and Regression Trees.
John Van Ryzin, Leo Breiman, Jerome H. Friedman et al. · Journal of the American Statistical Association · 1986 · 21K citations