Effect of Mismatched Sintering Kinetics on Camber in a Low‐Temperature Cofired Ceramic Package

Abstract

Linear shrinkage profiles of an unconstrained gold thick film material and a low ‐tempearture cofireable glass‐ceramic (LTCC) green tape were measured using a noncontact optical technique. A laser beam scans across a sample, at various times during the sintering process. The unconstrained sintering kinetics of the gold film were found to differ significantly from those of the LTCC tape. The densification of the gold film was nearly completed before the LTCC began to densify. The development of camber (warpage) during consintering of a gold/LTCC composite structure was monitored and recorded with a video camera. This camber development is analysed based on the viscous constitutive relations for porous based on the viscous constitutive relations for porous sintering bodies. The mismatched sintering kinetics of the two materials lead to the development of in‐plane stresses in the two constituents of the composite structure as one material being constrained from composite structure as one material being constrained of the composite structure as one material being constrained from sintering by the other. The resulting camber during the consintering process is explained by the development of these stresses.