Zinc oxide thin films on silicon carbide substrates (ZnO/SiC): electro-optical properties and electrically active defects

Abstract

The electrical and optical properties of heterojunctions formed by thermally deposited ZnO thin films on n-type 4H-SiC substrates have been investigated. Current–voltage characteristics of the fabricated light emitting devices revealed excellent rectifying behaviors with a typical leakage current lower than 1 nA at a reverse bias of −3 V, and with a forward current at 3 V in the range of 2 mA. A study of the electroluminescent characteristics of ZnO/SiC heterojunctions over the temperature range of 50–450 K showed an emission peak around 410 nm and a broad defect-related electroluminescence at room temperature in the visible range for a forward current of 300 mA. Electrically active deep level centers in ZnO and n-type 4H-SiC epilayers have been investigated by deep level transient spectroscopy (DLTS) and high-resolution Laplace DLTS (LDLTS). Additionally, LDLTS has successfully been employed to resolve the closely spaced hole trap energy levels.