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Transient, three-dimensional heat transfer model for the laser assisted machining of silicon nitride: I. Comparison of predictions with measured surface temperature histories

EngineeringMicrofabricationMaterial MachiningMechanical EngineeringApplied PhysicsLaser Processing TechnologyThermal ModelingThermodynamicsHeat TransferLaser-assisted DepositionThermal Engineering3D PrintingSilicon Nitride