Publication | Closed Access
Magnetic force microscopy of single-domain cobalt dots patterned using interference lithography
91
Citations
11
References
1996
Year
Co DotsEngineeringElectron-beam LithographyMicroscopyMagnetic ResonanceMagnetismMagnetic Data StorageBeam LithographyUniform ArraysNanolithographyNanometrologyNanolithography MethodMaterials ScienceMagnetic Force MicroscopyPhysicsSingle-domain Cobalt DotsNanotechnologyInterference LithographyMicroelectronicsMagnetic MaterialNanomaterialsMicrofabricationApplied PhysicsScanning Force MicroscopyMedicine
We have fabricated arrays of Co dots having diameters of 100 nm and 70 nm using interference lithography. The density of these arrays is 7.2/spl times/10/sup 9//in/sup 2/. Magnetic force microscopy measurements indicate that the Co dots are single-domain with moments that can be controlled to point either in-plane or out-of-plane. Interference lithography is a process that is easily scaled to large areas and is potentially capable of high throughput. Large, uniform arrays of single-domain structures are potentially useful for high-density, low-noise data storage.
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