Hybrid integration of surface-emitting microlaser chip and planar optics substrate for interconnection applications

J. Jahns, Robert Morgan, Hung Ngoc Nguyen, J. Walker, Susan J. Walker, Y.M. Wong

IEEE Photonics Technology Letters · 1992 · 34 citations · 12 references

Concepts

Abstract

The bonding of a monolithic array of surface-emitting microlasers onto a glass substrate that contains a matching array of microlenses and mirrors is reported. The bonding was achieved by flip-chip solder bump bonding using indium as the solder material. The alignment precision is within +or-2 mu m. The optical substrate provides a simple interconnection scheme that routes the light from each laser to well defined output positions.< <ETX xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">&gt;</ETX>

References

12