Electrically-activated, normally-closed diaphragm valves

Abstract

Electrically activated, normally closed diaphragm valves have been fabricated using heated bimetallic diaphragms to provide the operating force. These valves have been designed to provide fully proportional control of flows in the range of 0-150 cm/sup 3//min at input pressures between 1 and 50 PSIG. The valves are batch-fabricated using silicon micromachining techniques. By combining these valves with pressure or flow sensing elements, closed-loop pressure or flow control is easily accomplished.< <ETX xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">&gt;</ETX>