Influence of a chip scale package on the frequency response of a MEMS microphone - Concepedia

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Influence of a chip scale package on the frequency response of a MEMS microphone

17

Citations

4

References

2009

Year

Matthias Winter, Gregor Feiertag, Anton Leidl, H. Seidel

Microsystem Technologies

Chip-scale PackageEngineeringMicrofabricationMeasurementChip Scale PackageNoiseEducationInstrumentationMicroelectronicsAcoustic CameraFrequency ResponseMems MicrophoneMicro-electromechanical System

References

	Year	Citations

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