Integrated grating circuit for guided-beam multiple division fabricated by electron-beam direct writing

Abstract

An integrated grating circuit (IGC) for guided-beam multiple division was fabricated in an As2S3 film waveguide by the electron-beam direct-writing technique, and excellent optical performance was demonstrated. The circuit was composed of one chirped and three uniform-period gratings, each precisely arrayed to satisfy the Bragg condition. An incident IR guided beam (lambda = 1.153 microm) was successfully divided into multiple beams by an IGC of 1.0 X 3.0 mm. Design, fabrication technique, and optical performance of the IGC for guided-beam multiple division are discussed.