E-beam induced fabrication of microstructures

Abstract

E-beam-induced deposition of metal from a metal organic gas has been used for the formation of microstructures of various geometries. Three examples, line deposition, needle growth and bridge formation, have been selected for demonstration. Important parameters of the tungsten (W) deposition process from W(CO)/sub 6/ gas, such as minimum feature size, positional accuracy and growth rate, are given.< <ETX xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">&gt;</ETX>