Heiko Kohlmann

Manufacturing of lightweighted ZERODUR components at SCHOTT

Thorsten Döhring, Armin Thomas, Ralf Jedamzik et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2007 · 15 citations

Natural Sciences, Materials Engineering, Materials Science +10

Optimized glass-ceramic substrate materials for EUVL applications

Ina Mitra, Jochen Alkemper, Rolf Mueller et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2004 · 13 citations

Natural Sciences, Materials Engineering, Materials Science +12

Thermal expansion behavior of proposed EUVL substrate materials

Ina Mitra, Mark J. Davis, Jochen Alkemper et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2002 · 13 citations

Natural Sciences, Materials Engineering, Materials Science +16

E-beam induced fabrication of microstructures

W. H. Brünger, Heiko Kohlmann · 1992 · 13 citations

Natural Sciences, Materials Engineering, Materials Science +12