Characterization of polymer-like thin films deposited on silicon and glass substrates using PECVD method - Concepedia

Concepedia

Publication | Closed Access

Characterization of polymer-like thin films deposited on silicon and glass substrates using PECVD method

27

Citations

11

References

2003

Year

M.-C. Kim, S.-H. Cho, S.-B. Lee, Youn Sang Kim, Jin‐Hyo Boo

Thin Solid Films

Materials ScienceEngineeringSemiconducting PolymerFlexible ElectronicsPolymer-like Thin FilmsPolymer ScienceApplied PhysicsGlass SubstratesPecvd MethodPolymer CharacterizationThin FilmsChemical Vapor DepositionPolymer ChemistryThin Film Processing

References

	Year	Citations

Page 1

Page 1