Concepedia

Publication | Open Access

Corrugated membranes for improved pattern definition with micro/nanostencil lithography

DOIFull Paper Access

39

Citations

16

References

2005

Year

M A F van den Boogaart, Maryna Lishchynska, L M Doeswijk, James C. Greer, Juergen Brügger
Sensors and Actuators A Physical

References

YearCitations

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