Bell System Technical Journal · 1971 · 49 citations · 12 references
EngineeringElectrical EngineeringMicroelectronicsSemiconductor DevicesStatistical ModelingDevice CharacterizationDevice ModelingDevice SimulationIntegrated Circuit DesignIntegrated Circuit DevicesIntegrated Circuit FabricationCircuit ModelingDevice VariabilityMetal-oxide-semiconductor Field-effect Transistor ModelingProcess Variation AnalysisSemiconductor Device Characterization
Analysis of the variation in the electrical performance of integrated circuit structures requires a knowledge of the distributions and inter-relationships of device parameter values. This article presents new techniques for more accurate transistor modeling and describes the statistical characterization procedure developed to describe the integrated circuit manufacturing process as far as the measurable electrical parameters are concerned.
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