Publication | Closed Access
A direct method for the extraction of diffusion length and surface recombination velocity from an EBIC line scan: planar junction configuration
80
Citations
34
References
1995
Year
Electrical EngineeringEngineeringMicrofabricationMicroscopyEbic Line ScanSurface ScienceApplied PhysicsDirect MethodPlanar ConfigurationPlanar Junction ConfigurationMicroelectronics
A direct method of extracting bulk minority carrier diffusion length and surface recombination velocity from an EBIC line scan in the planar configuration is described. The accuracy of the method is verified by 3-D computer simulation and compared with existing methods. It mas found that this method is much simpler to use and gives better accuracy than existing methods.< <ETX xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">></ETX>
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