Three-dimensional micromachining of silicon using a nuclear microprobe

The National University of Singapore high energy ion nano-probe facility: Performance tests

F. Watt, J.A. van Kan, I. Rajta et al. · Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms · 2003 · 175 citations

Engineering, Nuclear Engineering, Instrumentation +7

Micromachining applications of porous silicon

Peter Steiner, Walter Lang · Thin Solid Films · 1995 · 174 citations

Engineering, Materials Engineering, Materials Science +12

Three-dimensional nanolithography using proton beam writing

J.A. van Kan, Andrew A. Bettiol, F. Watt · Applied Physics Letters · 2003 · 160 citations

Engineering, Materials Engineering, Materials Science +17

Three-dimensional microfabrication in bulk silicon using high-energy protons

Ee Jin Teo, Mark B. H. Breese, Emmanuel P. Tavernier et al. · Applied Physics Letters · 2004 · 77 citations

Engineering, Materials Engineering, Materials Science +17

Micromachining of silicon with a proton microbeam

P. Polesello, C. Manfredotti, F. Fizzotti et al. · Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms · 1999 · 37 citations

Engineering, Materials Engineering, Materials Science +12