Robustness of RF MEMS Capacitive Switches With Molybdenum Membranes

Abstract

This paper compares the characteristics of an RF microelectromechanical systems (MEMS) capacitive switch with a molybdenum membrane versus that of a switch with similar construction but with an aluminum membrane. In comparison, the molybdenum switch exhibits a significantly reduced sensitivity to ambient temperature change so that its pull-in voltage varies by less than 0.035 V/°C. In addition, large-signal RF performance of the switches was compared under both continuous wave and pulse conditions. The results show that under large RF signals, the self-biasing effect is exacerbated by the self-heating effect and the self-heating effect is in turn amplified by nonuniform current and temperature distributions on the membrane. Measurements of both molybdenum and aluminum switches demonstrate a hot-switched power-handling capacity of approximately 600 mW. Since aluminum has been used as a membrane material for over a decade while molybdenum is new, the above results indicate that molybdenum is a promising membrane material for RF MEMS capacitive switches.