Microsystem Technologies · 2005 · 38 citations · 0 references
EngineeringBioengineeringMechanical EngineeringBiomemsMicroelectromechanical SystemsMicrofabricationMems DesignMems FabricationMicrofabrication MaterialsMicrofabrication ProcessesMicrofluidic Device FabricationMicromachiningHigh-aspect-ratio MicromachiningMicroelectromechanical System FabricationMicroscale Fabrication