Zirconium nitrides deposited by dual ion beam sputtering: physical properties and growth modelling - Concepedia

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Zirconium nitrides deposited by dual ion beam sputtering: physical properties and growth modelling

57

Citations

18

References

1999

Year

L. Pichon, T. Girardeau, A. Straboni, F. Lignou, P. Guérin, J. Perrière

Applied Surface Science

Materials ScienceMaterials EngineeringIon ImplantationEngineeringPhysicsGrowth ModellingSurface ScienceApplied PhysicsZirconium NitridesIon BeamVacuum DeviceChemical Vapor DepositionMicrostructurePhysical Properties

References

	Year	Citations

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