Investigations on porous silicon as electrode material in electrochemical capacitors

Abstract

Abstract In this study, we have demonstrated the possibility of using macroporous silicon electrodes in electrochemical capacitors. Macroporous silicon was used to increase the surface exchange between pore surface and electrolyte. The inherent resistivity of the porous silicon can be reduced through the use of subsequent doping and metallization processes of the macropore surface. A systematic study of the electrolyte concentration and the porous silicon depth influences was also performed. A unit cell capacitance value of 320 µF/cm 2 was obtained with doped and metallized p‐type macroporous silicon electrodes. (© 2007 WILEY‐VCH Verlag GmbH & Co. KGaA, Weinheim)