Modelling and analysis of a MEMS approach to dc voltage step-up conversion

Abstract

This paper studies the principle of a voltage step-up converter based on a micromachined variable parallel-plate capacitor in combination with an electrostatic actuator. Electrical equivalent circuit and system-level SIMULINK models have been developed. An analysis of design parameters serves as a starting point for a novel prototype implementation. Possible areas of application are self-powered, standalone sensing systems, space applications and any kind of electrostatic or piezoelectric microsystem in general. Key Words: Electromechanical voltage conversion, electrostatic microstructures, MEMS modelling