Processing and Characterization of Silica Xerogel Films for Low-K Dielectric Applications

Use of quartz vibration for weighing thin films on a microbalance

G. Sauerbrey, F. Sauerbrey · The European Physical Journal A · 1959 · 6.8K citations

Engineering, Materials Science, Physics +11

Flow of a Viscous Liquid on a Rotating Disk

Alfred G. Emslie, Francis T. Bonner, Leslie G. Peck · Journal of Applied Physics · 1958 · 759 citations

Engineering, Mechanical Engineering, Physics +15

High density fluorocarbon etching of silicon in an inductively coupled plasma: Mechanism of etching through a thick steady state fluorocarbon layer

T. E. F. M. Standaert, M. Schaepkens, N. R. Rueger et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1998 · 262 citations

Natural Sciences, Materials Engineering, Materials Science +17

Role of steady state fluorocarbon films in the etching of silicon dioxide using CHF3 in an inductively coupled plasma reactor

N. R. Rueger, JJ Beulens, M. Schaepkens et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1997 · 253 citations

Natural Sciences, Materials Engineering, Materials Science +15

Copper Transport in Thermal SiO2

Yosi Shacham‐Diamand, A. Dedhia, D. Hoffstetter et al. · Journal of The Electrochemical Society · 1993 · 241 citations

Engineering, Materials Engineering, Materials Science +17