Publication | Closed Access
Etching characteristics and mechanical properties of a-SiC:H thin films
36
Citations
19
References
2001
Year
Materials EngineeringMaterials ScienceEngineeringApplied PhysicsThin Film Process TechnologyThin FilmsPlasma EtchingH Thin FilmsCarbide
| Year | Citations | |
|---|---|---|
Page 1
Page 1