Hybrid Amorphous and Polycrystalline Silicon Devices For Large-Area Electronics

An experimental study of the source/drain parasitic resistance effects in amorphous silicon thin film transistors

Shengwen Luan, G.W. Neudeck · Journal of Applied Physics · 1992 · 313 citations

Device Modeling, Electrical Engineering, Engineering +11

High-performance TFTs fabricated by XeCl excimer laser annealing of hydrogenated amorphous-silicon film

K. Sera, Fujio Okumura, Hiroyuki Uchida et al. · IEEE Transactions on Electron Devices · 1989 · 280 citations

Optical Materials, Engineering, Poly-si Thin-film Transistors +21

International Electron Devices Meeting. Technical Digest

1996 · 111 citations

Laser dehydrogenation/crystallization of plasma-enhanced chemical vapor deposited amorphous silicon for hybrid thin film transistors

P. Mei, J. B. Boyce, M. Hack et al. · Applied Physics Letters · 1994 · 106 citations

Materials Science, Electrical Engineering, Engineering +11

Amorphous Silicon Sensor Arrays for Radiation Imaging

R. A. Street, S. Nelson, LE Antonuk et al. · MRS Proceedings · 1990 · 99 citations

Engineering, Sensor Array, Microfabrication +5