P-Type Cu₂O/SnO Bilayer Thin Film Transistors Processed at Low Temperatures

Abstract

P-type Cu2O/SnO bilayer thin film transistors (TFTs) with tunable performance were fabricated using room temperature sputtered copper and tin oxides. Using Cu2O film as capping layer on top of a SnO film to control its stoichiometry, we have optimized the performance of the resulting bilayer transistor. A transistor with 10 nm/15 nm Cu2O to SnO thickness ratio (25 nm total thickness) showed the best performance using a maximum process temperature of 170 °C. The bilayer transistor exhibited p-type behavior with field-effect mobility, on-to-off current ratio, and threshold voltage of 0.66 cm(2) V(-1) s(-1), 1.5×10(2), and -5.2 V, respectively. The advantages of the bilayer structure relative to single layer transistor are discussed.