Applied Optics · 2005 · 248 citations · 13 references
EngineeringMeasurementCalibrationOptical TestingVibration MeasurementInterferometryComponent ErrorsError SourcesTime MetrologyEducationNew ClassInstrumentation
Recent technological innovations have enabled the development of a new class of dynamic, vibration‑insensitive interferometers based on a CCD pixel‑level phase‑shifting approach. The study presents theoretical and experimental results for a CCD pixel‑level phase‑shifting interferometer. The authors analyze component errors and instrument functionality of the interferometer. They find that most error sources produce small peak‑to‑valley errors of 0.002–0.005 λ, which are largely mitigated by high‑rate data acquisition and averaging.
Recent technological innovations have enabled the development of a new class of dynamic (vibration-insensitive) interferometer based on a CCD pixel-level phase-shifting approach. We present theoretical and experimental results for an interferometer based on this pixelated phase-shifting technique. Analyses of component errors and instrument functionality are presented. We show that the majority of error sources cause relatively small magnitude peak-to-valley errors in measurement of the order of 0.002-0.005lambda. These errors are largely mitigated by high-rate data acquisition and consequent data averaging.
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Instantaneous Phase Measuring Interferometry
R. Smythe, R. Moore · Optical Engineering · 1984 · 203 citations
Multichannel phase-shifted interferometer
Osuk Y. Kwon · Optics Letters · 1984 · 104 citations