Applied Optics · 1985 · 114 citations · 9 references
EngineeringMaterials ScienceMetrologyPhase TransformationsSurveyingDisplacement MeasurementInterferometryPolarization OpticsInterferometric InstrumentationInterferometric MeasurementOptical InterferometersPhase Shifting InterferometryPhase Shifting MechanismsPolarizationPolarization InterferometryShearing
A cyclic interferometer can be used for both lateral and radial shearing. Being common-path this interferometer is quite stable. The use of a cyclic shear interferometer for phase shifting interferometry is discussed. The phase shifting is provided here by polarization techniques. Some useful cyclic phase shifting interferometer arrangements are discussed, and the working of a polarization phase shifting cyclic shear interferometer is demonstrated.
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Two-wavelength phase shifting interferometry
Yeou-Yen Cheng, James C. Wyant · Applied Optics · 1984 · 432 citations
Engineering, Physics, Metrology +16
Fringe scanning Ronchi test for aspherical surfaces
Toyohiko Yatagai · Applied Optics · 1984 · 56 citations
Fringe Scanning Interferometers
John H. Bruning · 1978 · 49 citations