Concepedia

CVD process for copper interconnection

C. Marcadal, E. Richard, J. Torrès, J. Palleau, R. Madar

Microelectronic Engineering · 1997 · 11 citations · 0 references

Concepts

EngineeringManufacturing EngineeringMaterials EngineeringElectronic MaterialsMaterials ProcessingSemiconductor DevicesChemical Vapor DepositionInterconnect FormationInterconnect TechnologyPhysical Vapor DepositionCopper DepositionCopper InterconnectsInterconnect FabricationInterconnect Resistance Reduction